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Wafer-Level Scanning Acoustic Microscope

Wafer-Level Scanning Acoustic Microscope

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Auto SAM Wafer 304-Wafer InspectionAuto SAM Wafer 304-Wafer Inspection
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Auto SAM Wafer 304-Wafer Inspection

2024-07-22

The fully automated acoustic microscopes from the Auto SAM Wafer 304 enable fast detection of cavities, voids, bubbles, inclusions, and delamination and are ideally suitable for wafer inspection, bond checking, and MEMS inspection. An automatic defect-review software package performs a fully automated evaluation of the entire wafer. 

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